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Status已发表Published
TitleAuto-tuned variable structure control of cleanrooms
Creator
Date Issued1998
Source PublicationISA Transactions
ISSN0019-0578
Volume37Issue:4Pages:277-289
Abstract

This paper presents an approach for modelling and control of a cleanroom environment, and in this instance we focus on the cleanroom temperature. A modified relay feedback is employed as part of an automatic tuning procedure to introduce controlled perturbations into the closed-loop system. From the ensuing input-output signals, the parameters of a nonlinear physical model can be obtained using the least squares estimation algorithm. A variable structure controller is designed based on this model and it is able to ensure asymptotic tracking of the reference command signals and is robust in the presence of both parametric and non-parametric uncertainties. Simulation examples are provided for illustration. ©1998 Elsevier Science Ltd. All rights reserved.

KeywordAuto-tune Cleanroom
DOI10.1016/s0019-0578(98)00029-9
URLView source
Indexed BySCIE
Language英语English
WOS Research AreaAutomation & Control Systems ; Engineering ; Instruments & Instrumentation
WOS SubjectAutomation & Control Systems ; Engineering, Multidisciplinary ; Instruments & Instrumentation
WOS IDWOS:000077686900005
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
Identifierhttp://repository.uic.edu.cn/handle/39GCC9TT/3938
CollectionResearch outside affiliated institution
Corresponding AuthorTan, Kok Kiong
Affiliation
Department of Electrical Engineering, National University of Singapore, 10 Kent Ridge Crescent, 119260, Singapore, Singapore
Recommended Citation
GB/T 7714
Tan, Kok Kiong,Wang, Qingguo,Lee, Tong Henget al. Auto-tuned variable structure control of cleanrooms[J]. ISA Transactions, 1998, 37(4): 277-289.
APA Tan, Kok Kiong, Wang, Qingguo, Lee, Tong Heng, & Gan, C. H. (1998). Auto-tuned variable structure control of cleanrooms. ISA Transactions, 37(4), 277-289.
MLA Tan, Kok Kiong,et al."Auto-tuned variable structure control of cleanrooms". ISA Transactions 37.4(1998): 277-289.
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