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Faculty of Science and Tech...
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WANG Ya
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2024
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direct write laser (DWL)
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dry etching
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silk fibroin (SF)
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solubility change
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water development
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Advanced Science
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Multi- and Gray-Scale Thermal Lithography of Silk Fibroin as Water-Developable Resist for Micro and Nanofabrication
Journal article
Advanced Science,2024, volume: 11, issue: 12
Authors:
Rostami, Mohammadreza
;
Marković, Aleksandra
;
Wang, Ya
;
Pernollet, Joffrey
;
Zhang, Xiaosheng
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Submit date：2024/05/07
direct write laser (DWL)
dry etching
silk fibroin (SF)
solubility change
thermal scanning probe lithography (t-SPL)
water development
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